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Description
CVD Tool Info. Voltage: 208VAC/ Phase: 3P/ Current: 250A/ Frequency: 60Hz Status: Storing at our facility(under temp & humid control) [Chamber A, B, C ] Process: PECVD Gas Config Maker: Aera FC 786C/ Unit:SLM Ar(7), NF3(3), N2O(1), N2O(5), He(4), PN2(6), SiH4(0.6), NH3(3) RPC : MKS_AX7657 11 (2L) HF Generator: AD TEC_AX 1000III LF Generator: AD TEC_AX 1000LFIIIConfiguration
CVDOEM Model Description
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.Documents
No documents
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
49088
Wafer Sizes:
12"/300mm
Vintage:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASM
EAGLE 12
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
49088
Wafer Sizes:
12"/300mm
Vintage:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
CVD Tool Info. Voltage: 208VAC/ Phase: 3P/ Current: 250A/ Frequency: 60Hz Status: Storing at our facility(under temp & humid control) [Chamber A, B, C ] Process: PECVD Gas Config Maker: Aera FC 786C/ Unit:SLM Ar(7), NF3(3), N2O(1), N2O(5), He(4), PN2(6), SiH4(0.6), NH3(3) RPC : MKS_AX7657 11 (2L) HF Generator: AD TEC_AX 1000III LF Generator: AD TEC_AX 1000LFIIIConfiguration
CVDOEM Model Description
The Eagle is a single-wafer processing product platform for PECVD applications. The Eagle 12 is for 300mm wafers.Documents
No documents