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The UltraStep 1500 is a big field 1:1 projection stepper system that exposes reticle images onto wafers of various sizes in a step-and-repeat manner. It has a fine line resolution of 1.0um standard and 0.8um optional, and tight overlay accuracy. The UltraStep 1500 features a larger exposure field, an electronic focus system, electronic target detectors, 944 servo boards, and a cast illuminator with upgraded optics. These features allow for large die exposure, increased throughput, more accurate and repeatable substrate positioning, simultaneous independent target scans, more stability during movement and exposure, and lower exposure field uniformity. The UltraStep 1500’s low cost and compact design make it an ideal choice for chipmakers upgrading from older equipment, and it can be integrated with other higher resolution steppers to maximize throughput while minimizing production costs.Documents
VEECO / ULTRATECH
1500
Verified
CATEGORY
Photolithography
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
42643
Wafer Sizes:
4"/100mm, 5"/125mm, 6"/150mm
Vintage:
Unknown
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Money Back Guarantee
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Refurbishment Services
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VEECO / ULTRATECH
1500
CATEGORY
Photolithography
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
42643
Wafer Sizes:
4"/100mm, 5"/125mm, 6"/150mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available