Description
Wafer / Reticle inspection .15um particle detection / bare siliconConfiguration
Wafer / Reticle scanner 100mm - 200mm .15 um particle detection / newOEM Model Description
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.Documents
No documents
Verified
CATEGORY
Metrology
Last Verified: 3 days ago
Key Item Details
Condition:
New
Operational Status:
Installed / Running
Product ID:
153188
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
SILVER SAGE PRECISION
SDMxy100
CATEGORY
Metrology
Last Verified: 3 days ago
Key Item Details
Condition:
New
Operational Status:
Installed / Running
Product ID:
153188
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Wafer / Reticle inspection .15um particle detection / bare siliconConfiguration
Wafer / Reticle scanner 100mm - 200mm .15 um particle detection / newOEM Model Description
The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification.Documents
No documents