In late 2020 Silver Sage Precision LLC and Silver Sage Idaho LLC formed a partnership to manufacture a cost-effective surface defect monitoring tool to enable equipment manufacturers, educational institutions and semiconductor companies to perform accurate and repeatable measurements for process monitoring and troubleshooting.

The SDM-100xy is a dark-field laser surface defect monitor capable of scanning 150mm–200mm silicon wafers, reticles, photomasks, and glass substrates. Scanning the glass side of a reticle is within capability with minor modifications; pellicle scanning feasibility can be tested. All non-silicon materials require a specific calibration to ensure accurate defect size classification. 

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SDMxy100

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