Description
Tencor / Prometrix RS 55 (RS55) 5PPConfiguration
No ConfigurationOEM Model Description
The Prometrix RS55 is a four-point probe resistivity mapping system manufactured by KLA-Tencor. It has a temperature compensation configuration (RS55/TC) and can handle wafers up to 8"/200mm in size. It has manual wafer handling and can provide contour maps, 3-D plots, and diameter scans. It can also compensate sheet resistance measurements against ambient temperature and materials.Documents
No documents
KLA
RS55
Verified
CATEGORY
Metrology
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
66002
Wafer Sizes:
8"/200mm
Vintage:
1996
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Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
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KLA
RS55
Verified
CATEGORY
Metrology
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
66002
Wafer Sizes:
8"/200mm
Vintage:
1996
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Tencor / Prometrix RS 55 (RS55) 5PPConfiguration
No ConfigurationOEM Model Description
The Prometrix RS55 is a four-point probe resistivity mapping system manufactured by KLA-Tencor. It has a temperature compensation configuration (RS55/TC) and can handle wafers up to 8"/200mm in size. It has manual wafer handling and can provide contour maps, 3-D plots, and diameter scans. It can also compensate sheet resistance measurements against ambient temperature and materials.Documents
No documents