Description

SUSS MA6 (With IR back microscope)

Configuration

- Wafer Size: Capable of Exposure on Small Pieces up to 6”/150mm Diameter Wafers depending on tooling - Configured for Topside (TSA) Alignment and Bottom Side IR(BSA) - DVM6 - UV400 Optics (for 365nm and 405nm exposure - Includes 5x, 10x, 20x objectives - CIC 1000 Power Supply - 350W Lamphouse - Capable of Soft, Hard, Proximity and Vacuum Contacts (depending on tooling) - Includes (Qty 1) included 6” BSA chuck and mask holder 7 X 7 - Vibration Isolation Table (for SUSS MA6) - System Power: 230V, 50/60 Hz

OEM Model Description

The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.

Documents

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SUSS MicroTec / KARL SUSS

MA6

Verified

Mask/Bond Aligners

Last Verified: 18 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

145113

Wafer Sizes:

Unknown

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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