Description

No description

Configuration

Mask Aligner Karl SUSS MicroTec MA6 - UV lithography system Equipment: UV exposure at 365 nm, Backlight unit with NIR camera, Wafer chucks (transmitted light), mask holder, Accessories: LCPLAN FL 20x/0.40 lens, LMPLFLN 20x/0.40 lens, 11.25x0.16 lens (separation), Optometer without sensor with case, Mask holder MA6/BA6/BL/Cont/M-3, Mask holder MA6/BA6/BL/Prox/Cont, Sola-Check accessories, Chuck MA6/BA6/VAC/TEFFLON/W-100/S.

OEM Model Description

The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.

Documents

No documents

SUSS MicroTec / KARL SUSS

MA6

Verified

Mask/Bond Aligners

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Deinstalled / Palletized

Product ID:

128496

Wafer Sizes:

Unknown

Vintage:

2001

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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