Description

TSA/BSA

Configuration

basic system prepared for manual alignment stage with: - automatic wedge compensation system in contact or without contact between mask and wafer (with reference balls), Alignment gap programmable from 1 to 1000 micron, resolution 1 micron - movement range: X +/-10.0mm, Y +/-5.0mm, Theta +/-5° basic equipment consisting of: - machine base with mechanical, pneumatic and electrical equipment 230V/50Hz and 115V/60Hz - adapter system for mask holders for use in combination with mask holders for masks up to 7" x 7" max. - TSA microscope stage with motorized X-Y manipulator and manual rotation for microscope - with integrated microscope tilt for exposure and to create access for mask loading - prepared for fixed exposure unit - manual loading and unloading of wafers or substrates - microprocessor control with LCD display - for wafers 2" up to 150 mm dia. or substrates 2" x 2" up to 6" x 6" - operator manual in English - prepared for BSA microscopes with working distance 26mm - among other things to be ordered separately: - manual alignment stage system dependent on necessary BSA microscope objective separation - TSA and/or BSA scopes - exposure unit, lamp and optics - mask holders and chucks - other accessories are available Exposure Unit MA6/BA6/350W - Optics housing and mirror housing with ellipsoidal mirror and surface mirror - For wafer/substrate sizes up to 150mm diameter / 6" x 6'' - For exposure lamps up to 500W possible - Prepared for use in combination with exposure optics optimized for high uniformity and high intensity for various wavelengths and applications: - Range of wavelengths: 250nm to 435nm with 350W lamps - With components for optimized diffraction reduction for high resolution proximity or contact printing - For large gap exposure or thick resists BOTTOM SIDE ALIGNMENT SYSTEM'MA6/BA6/BA8 AA=26 FOR DVCU SYSTEM - two special video microscopes with one magnification 128X/410X (refers to 17" monitor) - motorized stages - separation in X: 15mm ...100mm - travel in Y: - 20mm to + 50mm - motorized focus 6mm - two 1/2" CCD video cameras LAMP ADAPTER LH350/HBO350W/S HG LAMP 350W / Osram OPTICS UV400/W-150/LH350 Consisting of: - Cold light mirror no 1 100x115mm - Fly's eye - Condensor lens, Herasil, dia. 55mm - Two lens plates, Herasil, conf. A - Font lens, transparent, dia. 180mm LAMP POWER SUPPLY UNIT CIC12OO FOR LH35O - Constant light intensity mode - Constant power mode - For the DC lamps 200W, 350W/S, 500W, XE 500W - Operation of additional lamp with a current of up to 35A possible (has to be specified and agreed upon) - Easy operation due to microprocessor control - Simultaneous digital display of light intensity and lamp power - Integrated connector for UV probe for easy calibration - Dual channel mode for 2-channel light sensors with various wavelengths - Interlock for machine and lamp protection - For input voltages of 230V +/- 10%, 50/60Hz - Power consumption: maximum 2300 VA - Single pulse ignition ensures gentle operation, provides easy lamp start and increases lamp durability SUSS 2-CHANNEL LIGHT SENSOR 365/405NM FOR CIC - For lamp power control - Installed inside mirror house ALIGNMENT STAGE MA/BA6-8/WD-26/MAN - X-Y-THETA alignment stage with high precision micrometer screws for manual alignment - WEC Head for BSA microscope objective separation in X direction from 15mm to 100mm - motorized Z axis ENHANCED IMAGE STORAGE SYSTEM DVCU FOR MA8/BA6 image storage and fine focus controller for simultaneous focused images of mask and wafer for easy and precise alignment with large object magnification or large alignment gaps - PC with image and fine focus control - for M306/8, DVM6/8 and BSA 17" TFT flat screen - integrated trackball - 5-VGA resolution 1280x1024 - contrast integration function for pure contrast images - electronic brightness. contrast and magnification adjustment - adjustment of brightness ratio stored/live image SUSS M336 MICROSCOPE DVM MICROSCOPE ILLUMINATION 85W/M500/M306/MA6/BA6/LH350 - With yellow filter - Halogen illumination 13.8V/85W to be attached to MA6/BA6 with LH350 SET OF TURRETS FOR 3 LENSES DVM6/8 LENs LMPL 10XIR/0.30 SUSS UV OPTOMETER CASE CPL. - For intensity and intensity uniformity calculation - Dose measurement functionality - To be ordered with SUSS OPTOMETER sample (365/405nm: G187080) - Storage case for measurement system and probes SUSS UV LIGHT MEASURING PROBE 365/405NM for UV OPTOMETER - Combined 2 channel probe 365/405nm - Improved measurement accuracy and repeatability - improved shock resistance - only in combination with SUSS UV OPTOMETER (G207355) CHUCK MA6/BA6/VAC/BSA/W-100 - For wafer diameter 100mm - For proximity, soft and vacuum contact exposures - With 2 openings for viewing of alignment pattern X=32mm x Y=20mm - Center position of openings Xl/r=t30mm Y=0 (relative to chuck center) - With prealign pins - for Top Side and Bottom Side Alignment MASK HOLDER MA6/ BA6/ BL/PROX/CONT/M-5-6/W-100 - Bottom loading - Contact/proximity wedge error compensation - For masks from 5"x5" to 6"x6" - Exposure opening for wafers dia. 100mm - With displaceable stop pins - With displaceable additional mechanical clamping SUSS MA6/BA6 VIBRATION ISOLATION AND DAMPING SYSTEM - Anti-vibration machine base frame / black - Dimension: 930mm x 950mm x 705mm - One shelf 280mm x 700mm, height adjustable - Three covers right, left and backside - Four wheels - Handrest for ergonomic operation of the machine - Pneumatic vibration isolation and automatic height control - Vertical frequency of resonance: < 2Hz at rated load - Horizontal frequency of resonance: < 1.8Hz at rated load - improved horizontal damping - Max. load: 590kg

OEM Model Description

The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.

Documents

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SUSS MicroTec / KARL SUSS

MA6

Verified

Mask/Bond Aligners

Last Verified: Over 60 days ago

Key Item Details

Condition:

Refurbished

Operational Status:

Unknown

Product ID:

132884

Wafer Sizes:

Unknown

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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