The GAMMA 2130 system is a front-end-of-line (FEOL) photoresist strip system for 300mm wafers. Our multi-station sequential processing architecture incorporates six stations within a single process chamber, enabling a 30 percent higher throughput rate when compared to that of the closest competitor.

Novellus acquired Gasonics in 2001. Novellus now offers a suite of advanced photoresist strip and clean products. 

LAM RESEARCH / NOVELLUS / GASONICS 

GAMMA 2130

Process: PR Strip

1. System Configuration:

Main System
Load Port: Brooks Fixload TM V6
EFEM Robot: 02-169208-00
Aligner: Yaskawa
RF Rack: Generator ENI GHW-50A-04 5ea
UI Panel
Light Curtain: KEYENCE
Signal Cable (RF Cable Included)

2. Process Chamber Configuration:

GXT type (Upgrade Bell jar and Quartz tube)
EPD: 4ea(#2,#3,#4,#5 Port)
RF Matcher: CPMX-3000 5ea
RF Source: 02-352103-00 5ea
Load/Unload Port
HDIS Pedestal: #2, #3, #,1, #6
Fixed Pedestal: #4, #5
Stage #1: Preheat
Yaskawa Spindle
Athenta Computer
UI Computer
Gate Valve: MDC ISO Valve
Throttle Valve: NC
Slit Valve: V-TEX
Manometer: MKS 10 Torr
Gas Box: MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4

Process: PR Strip

1. System Configuration:

Main System
Load Port: Brooks Fixload TM V6
EFEM Robot: 02-169208-00
Aligner: Yaskawa
RF Rack: Generator ENI GHW-50A-04 5ea
UI Panel
Light Curtain: KEYENCE
Signal Cable (RF Cable Included)

2. Process Chamber Configuration:

Express type (Upgrade Bell Jar and Quartz Tube)
EPD: 4ea (#2,#3,#4,#5 Port)
RF Matcher: CPMX-3000 5ea
RF Source: 02-352103-00 5ea
Load/Unload Port
HDIS Pedestal: #2, #3, #,1, #6
Fixed Pedestal: #4, #5
Stage #1: Preheat
Yaskawa Spindle
Athenta Computer
UI Computer
Gate Valve: MDC ISO Valve
Throttle Valve: NC
Slit Valve: V-TEX
Manometer: MKS 10 Torr
Gas Box: MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4

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