Description
High Current Implanter MAX ENERGY 200KeV 300MM TDK J1 LP W/RFID READER & MAPPING ELS4 TUNGSTEN, NON-VAP, LINED, SOURCE CRYO PUMPS: 4 X 320FX AEF CRYO PUMP: 1 X 320FX, 1X 250FE CRYO COMPRESSOR IS2000 & IS1000 TERMINAL ISOLATION TRANSFORMER 480VAC 50/50 Hz GAS BOX EXHAUST 4 LIGHT TOWER W/A/G/B - FRONT & REAR E84 OHT CONTROLLER COMMUNICATION KIT E84 4X PIO/IF MODULES: DMS-HB1 E84 PIO CABLE CONNECTOR ADAPTER SET GAS LINES STR# GAS MODULE GAS MFC FITTING 1 SUB-ATM FLOURIDE BF3 GF120X-909480 2 SUB-ATM HYDRIDE AsH3 GF120X-909480 3 SUB-ATM HYDRIDE PH3 GF120X-909480 4 SUB-ATM FLOURIDE GeF4 ENRICHED GF120X-909480 5 HIGH PRESSURE XENON GF120C-909811 CGA 580 W/VITRON 1/4" MVCR W/M NUT 6 HIGH PRESSURE SiF4 GF120C-909811 CGA 580 W/VITRON 1/4" MVCR W/M NUT EXTERNAL A ARGON GF120C-909811 EXTERNAL B N2 GF120C-909811 OPTIONAL BENEFITS PROCESS CHAMBER LINERS LEAD FLOOR EFEM IONIZATION BAR EFEM LIGHT SWITCH EFEM LIGHT CURTAIN AUX MOBILE WORKSTATION GRAPHITE SHIELD SCARA LINK 1 & 2 STAINLESS STELL HOSES FOR REMOTE MODULES TOXIC EXHAUST GAUGE SPLASH & DAMAGE SHIELD KIT RP1 N2 FLOW SENSOR ISOLATION VALVE IG11 ON SOURCE HOUSING LOADLOCK HIGH PURITY N2 CONNECTION TRANSFER CHAMBER LINER FARADAY COLLECTION TRAY SOURCE HOUSING CLEANING EXHAUST PC DOOR CABLE COVERS ENHANCED PRODUCTIVITY OPTION ENHANCED WATER COOLING (2.0kW) CAPACITY SW LICENSE EDWARDS TP1 LIFTING FIXTURE EDWARDS TP6 LIFITING FIXTUREConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
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Verified
CATEGORY
High Current
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
135037
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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AXCELIS
PURION H200
CATEGORY
High Current
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
135037
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
High Current Implanter MAX ENERGY 200KeV 300MM TDK J1 LP W/RFID READER & MAPPING ELS4 TUNGSTEN, NON-VAP, LINED, SOURCE CRYO PUMPS: 4 X 320FX AEF CRYO PUMP: 1 X 320FX, 1X 250FE CRYO COMPRESSOR IS2000 & IS1000 TERMINAL ISOLATION TRANSFORMER 480VAC 50/50 Hz GAS BOX EXHAUST 4 LIGHT TOWER W/A/G/B - FRONT & REAR E84 OHT CONTROLLER COMMUNICATION KIT E84 4X PIO/IF MODULES: DMS-HB1 E84 PIO CABLE CONNECTOR ADAPTER SET GAS LINES STR# GAS MODULE GAS MFC FITTING 1 SUB-ATM FLOURIDE BF3 GF120X-909480 2 SUB-ATM HYDRIDE AsH3 GF120X-909480 3 SUB-ATM HYDRIDE PH3 GF120X-909480 4 SUB-ATM FLOURIDE GeF4 ENRICHED GF120X-909480 5 HIGH PRESSURE XENON GF120C-909811 CGA 580 W/VITRON 1/4" MVCR W/M NUT 6 HIGH PRESSURE SiF4 GF120C-909811 CGA 580 W/VITRON 1/4" MVCR W/M NUT EXTERNAL A ARGON GF120C-909811 EXTERNAL B N2 GF120C-909811 OPTIONAL BENEFITS PROCESS CHAMBER LINERS LEAD FLOOR EFEM IONIZATION BAR EFEM LIGHT SWITCH EFEM LIGHT CURTAIN AUX MOBILE WORKSTATION GRAPHITE SHIELD SCARA LINK 1 & 2 STAINLESS STELL HOSES FOR REMOTE MODULES TOXIC EXHAUST GAUGE SPLASH & DAMAGE SHIELD KIT RP1 N2 FLOW SENSOR ISOLATION VALVE IG11 ON SOURCE HOUSING LOADLOCK HIGH PURITY N2 CONNECTION TRANSFER CHAMBER LINER FARADAY COLLECTION TRAY SOURCE HOUSING CLEANING EXHAUST PC DOOR CABLE COVERS ENHANCED PRODUCTIVITY OPTION ENHANCED WATER COOLING (2.0kW) CAPACITY SW LICENSE EDWARDS TP1 LIFTING FIXTURE EDWARDS TP6 LIFITING FIXTUREConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents