Designs, manufactures and services ion implantation and other processing equipment used in the fabrication of semiconductor chips.

AXCELIS

PURION H200

High Current Implanter

Is System On-Line?	Yes 
Can Produce Wafers As-Is ?	No
CE Mark Certified ?	Yes 

Overall Tool Condition	 
Any Field Modifications ?	No
All Cables present ?	Yes
Any Corrosion visible on modules ?	No
Any Missing / Damaged Parts ?	No
Shipping Brackets Included ?	Yes 
Wafer Handler	Yes
Handler Type	 
# of Cassette / FOUP Loaders	FOUP Loaders
End-Effecter Type	150mm Single
Pre-Aligner ?	Yes
Mini-Environment	Yes
Handler Options ?	150mm Hot chuck
System Software	 
System SW (OS) version	Windows 10
System SW (App) version	3.8.3.0.2
Log-In User Name	Sysadmin
Log-In Password	sysadmin
SEMI Std Options (E84, E99, etc..)	E84
HSMS	Yes
Supporting Equipment	 
Ext Transformer	No
UPS	No
Heat Exchanger / Chiller	Chiller
Facility Requirements	 
CDA	Yes
DIW	Yes
Gas	GN2,PN2,Ar
Power 	480V 3phase 5Wire

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High Current Implanter


Is System On-Line?	Yes 
Can Produce Wafers As-Is ?	No
CE Mark Certified ?	Yes 

Overall Tool Condition	 
Any Field Modifications ?	No
All Cables present ?	Yes
Any Corrosion visible on modules ?	No
Any Missing / Damaged Parts ?	No
Shipping Brackets Included ?	Yes 

Wafer Handler	Yes
Handler Type	 
# of Cassette / FOUP Loaders	FOUP Loaders
End-Effecter Type	150mm Single
Pre-Aligner ?	Yes
Mini-Environment	Yes
Handler Options ?	150mm Hot chuck

System Software	 
System SW (OS) version	Windows 10
System SW (App) version	3.8.3.0.2
Log-In User Name	Sysadmin
Log-In Password	sysadmin
SEMI Std Options (E84, E99, etc..)	E84
HSMS	Yes
Supporting Equipment	 
Ext Transformer	No
UPS	No
Heat Exchanger / Chiller	Chiller
Facility Requirements	 
CDA	Yes
DIW	Yes
Gas	GN2,PN2,Ar
Power 	480V 3phase 5Wire

High Current Implanter

Is System On-Line?	Yes 
Can Produce Wafers As-Is ?	No
CE Mark Certified ?	Yes

Overall Tool Condition
Any Field Modifications ?	No
All Cables present ?	Yes
Any Corrosion visible on modules ?	No
Any Missing / Damaged Parts ?	No

Wafer Handler	Yes
Handler Type	 
# of Cassette / FOUP Loaders	FOUP Loaders
End-Effecter Type	150mm Single
Pre-Aligner ?	Yes
Mini-Environment	Yes
Handler Options ?	150mm Hot chuck

System Software	 
System SW (OS) version	Windows 10
System SW (App) version	3.8.3.0.2
Log-In User Name	Sysadmin
Log-In Password	sysadmin
SEMI Std Options (E84, E99, etc..)	E84
HSMS	Yes
Supporting Equipment	 
Ext Transformer	No
UPS	No
Heat Exchanger / Chiller	Chiller

Facility Requirements	 
CDA	Yes
DIW	Yes
Gas	GN2,PN2,Ar
Power 	480V 3phase 5Wire

High Current Implanter

Is System On-Line?	Yes 
Can Produce Wafers As-Is ?	No
CE Mark Certified ?	Yes 


Overall Tool Condition	 
Any Field Modifications ?	No
All Cables present ?	Yes
Any Corrosion visible on modules ?	No
Any Missing / Damaged Parts ?	No

Wafer Handler	Yes
Handler Type	 
# of Cassette / FOUP Loaders	FOUP Loaders
End-Effecter Type	150mm Single
Pre-Aligner ?	Yes
Mini-Environment	Yes
Handler Options ?	150mm Hot chuck

System Software	 
System SW (OS) version	Windows 10
System SW (App) version	3.8.3.0.2
Log-In User Name	Sysadmin
Log-In Password	sysadmin
SEMI Std Options (E84, E99, etc..)	E84
HSMS	Yes
Supporting Equipment	 
Ext Transformer	No
UPS	No
Heat Exchanger / Chiller	Chiller



High Current Implanter


MAX ENERGY 200KeV			
300MM TDK J1 LP W/RFID READER & MAPPING	
ELS4 TUNGSTEN, NON-VAP, LINED, SOURCE	
CRYO PUMPS: 4 X 320FX			
AEF CRYO PUMP: 1 X 320FX, 1X 250FE		
CRYO COMPRESSOR IS2000 & IS1000		
TERMINAL ISOLATION TRANSFORMER 480VAC 50/50 Hz	
GAS BOX EXHAUST			
4 LIGHT TOWER W/A/G/B - FRONT & REAR		
E84 OHT CONTROLLER COMMUNICATION KIT	
E84 4X PIO/IF MODULES: DMS-HB1		
E84 PIO CABLE CONNECTOR ADAPTER SET	

GAS LINES 			
STR#	GAS MODULE	GAS	MFC	FITTING
1	SUB-ATM FLOURIDE	BF3	GF120X-909480	
2	SUB-ATM HYDRIDE	AsH3	GF120X-909480	
3	SUB-ATM HYDRIDE	PH3	GF120X-909480	
4	SUB-ATM FLOURIDE	GeF4 ENRICHED	GF120X-909480	
5	HIGH PRESSURE	XENON	GF120C-909811	CGA 580 W/VITRON 1/4" MVCR W/M NUT
6	HIGH PRESSURE	SiF4	GF120C-909811	CGA 580 W/VITRON 1/4" MVCR W/M NUT
EXTERNAL A	ARGON	GF120C-909811	
EXTERNAL B	N2	GF120C-909811	

	OPTIONAL BENEFITS			
PROCESS CHAMBER LINERS		
LEAD FLOOR			
EFEM IONIZATION BAR		
EFEM LIGHT SWITCH		
EFEM LIGHT CURTAIN		
AUX MOBILE WORKSTATION		
GRAPHITE SHIELD SCARA LINK 1 & 2	
STAINLESS STELL HOSES FOR REMOTE MODULES
TOXIC EXHAUST GAUGE		
SPLASH & DAMAGE SHIELD KIT		
RP1 N2 FLOW SENSOR		
ISOLATION VALVE IG11 ON SOURCE HOUSING	
LOADLOCK HIGH PURITY N2 CONNECTION	
TRANSFER CHAMBER LINER		
FARADAY COLLECTION TRAY		
SOURCE HOUSING CLEANING EXHAUST	
PC DOOR CABLE COVERS		
ENHANCED PRODUCTIVITY OPTION	
ENHANCED WATER COOLING (2.0kW) CAPACITY SW LICENSE
EDWARDS TP1 LIFTING FIXTURE		
EDWARDS TP6 LIFITING FIXTURE	


High Current Implanter

MAX ENERGY 200KeV			
300MM TDK J1 LP W/RFID READER & MAPPING	
ELS4 TUNGSTEN, NON-VAP, LINED, SOURCE	
CRYO PUMPS: 4 X 320FX			
AEF CRYO PUMP: 1 X 320FX, 1X 250FE		
CRYO COMPRESSOR IS2000 & IS1000		
TERMINAL ISOLATION TRANSFORMER 480VAC 50/50 Hz	
GAS BOX EXHAUST			
4 LIGHT TOWER W/A/G/B - FRONT & REAR		
E84 OHT CONTROLLER COMMUNICATION KIT	
E84 4X PIO/IF MODULES: DMS-HB1		
E84 PIO CABLE CONNECTOR ADAPTER SET	

GAS LINES 			
STR#	GAS MODULE	GAS	MFC	FITTING
1	SUB-ATM FLOURIDE	BF3	GF120X-909480	
2	SUB-ATM HYDRIDE	AsH3	GF120X-909480	
3	SUB-ATM HYDRIDE	PH3	GF120X-909480	
4	SUB-ATM FLOURIDE	GeF4 ENRICHED	GF120X-909480	
5	HIGH PRESSURE	XENON	GF120C-909811	CGA 580 W/VITRON 1/4" MVCR W/M NUT
6	HIGH PRESSURE	SiF4	GF120C-909811	CGA 580 W/VITRON 1/4" MVCR W/M NUT
EXTERNAL A	ARGON	GF120C-909811	
EXTERNAL B	N2	GF120C-909811

OPTIONAL BENEFITS			
PROCESS CHAMBER LINERS		
LEAD FLOOR			
EFEM IONIZATION BAR		
EFEM LIGHT SWITCH		
EFEM LIGHT CURTAIN		
AUX MOBILE WORKSTATION		
GRAPHITE SHIELD SCARA LINK 1 & 2	
STAINLESS STELL HOSES FOR REMOTE MODULES
TOXIC EXHAUST GAUGE		
SPLASH & DAMAGE SHIELD KIT		
RP1 N2 FLOW SENSOR		
ISOLATION VALVE IG11 ON SOURCE HOUSING	
LOADLOCK HIGH PURITY N2 CONNECTION	
TRANSFER CHAMBER LINER		
FARADAY COLLECTION TRAY		
SOURCE HOUSING CLEANING EXHAUST	
PC DOOR CABLE COVERS		
ENHANCED PRODUCTIVITY OPTION	
ENHANCED WATER COOLING (2.0kW) CAPACITY SW LICENSE
EDWARDS TP1 LIFTING FIXTURE		
EDWARDS TP6 LIFITING FIXTURE	











High Current Implanter


Is System On-Line?	Yes 
Can Produce Wafers As-Is ?	No
CE Mark Certified ?	Yes 

Pre-Aligner ?	Yes
Mini-Environment	Yes
Handler Options ?	150mm Hot chuck

System Software	 
System SW (OS) version	Windows 10
System SW (App) version	3.8.3.0.2

SEMI Std Options - E84
Chiller

Facility Requirements	 
CDA	Yes
DIW	Yes
Gas	GN2,PN2,Ar
Power 	480V 3phase 5Wire


PURION H200

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