Description
Backside UsherConfiguration
No ConfigurationOEM Model Description
Plasma Mode: RIE / DP mode changeable Electrode Structure: Parallel flat stage RF Power MAX.: 500W Oscillation Frequency: 13.56MHz Quartz Oscillator Display: LED touch panel Chamber Dimensions: W500 × D300 × H200mm Stage Size: W400 × D200mm Chamber Material: Aluminium Reaction Gas: 2 systems（Ar, O2） Purge Gas: N2 or Dry air Reaction Gas Flow Control: Mass flow controllerDocuments
No documents
YAMATO SCIENTIFIC
PDC510
Verified
CATEGORY
Etch/Asher
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
71182
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
YAMATO SCIENTIFIC
PDC510
CATEGORY
Etch/Asher
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
71182
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Backside UsherConfiguration
No ConfigurationOEM Model Description
Plasma Mode: RIE / DP mode changeable Electrode Structure: Parallel flat stage RF Power MAX.: 500W Oscillation Frequency: 13.56MHz Quartz Oscillator Display: LED touch panel Chamber Dimensions: W500 × D300 × H200mm Stage Size: W400 × D200mm Chamber Material: Aluminium Reaction Gas: 2 systems（Ar, O2） Purge Gas: N2 or Dry air Reaction Gas Flow Control: Mass flow controllerDocuments
No documents