YAMATO SCIENTIFIC

V1000X

Plasma Mode:	RIE / DP mode changeable
Electrode Structure: Parallel flat stage
RF Power	MAX.: 500W
Oscillation Frequency: 13.56MHz　Quartz Oscillator
Display: LED touch panel
Chamber Dimensions: W500 × D300 × H200mm
Stage Size: W400 × D200mm
Chamber Material: Aluminium
Reaction Gas: 2 systems（Ar, O2）
Purge Gas: N2 or Dry air
Reaction Gas Flow Control: Mass flow controller

PDC510

Plasma Cleaner (Parallel Electrode) - Simple and compact plasma surface treatment device

YAMATO SCIENTIFIC

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V1000X

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