Description
ReactorConfiguration
- 3 atmospheric epi chambers - 1 cool down chamber - Variable Speed Blower - HP+ Robot - Wide Body Loadlocks - On-The-Fly Center Finder - Accusett BMV system - HSMS GEMSECS - 2 mixed dopant supply lines - TCS supply line - Universal loadlock platform (200mm or 150mm) - with 208V external transformer - No process kits includedOEM Model Description
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.Documents
No documents
APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
Verified
CATEGORY
Epitaxial deposition (EPI)
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
84555
Wafer Sizes:
Unknown
Vintage:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View AllAPPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
Verified
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
84555
Wafer Sizes:
Unknown
Vintage:
2004
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
ReactorConfiguration
- 3 atmospheric epi chambers - 1 cool down chamber - Variable Speed Blower - HP+ Robot - Wide Body Loadlocks - On-The-Fly Center Finder - Accusett BMV system - HSMS GEMSECS - 2 mixed dopant supply lines - TCS supply line - Universal loadlock platform (200mm or 150mm) - with 208V external transformer - No process kits includedOEM Model Description
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.Documents
No documents