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Detail Attached Below AMAT Centura HTF 3ch Epi system (ATM or RP) System is stripped down to the frame Frame is cleaned, prepared and Power-coated Transfer chamber is cleaned and Ni-plated Loadlock shells and parts are cleaned and Ni-plated if needed Loadlocks are disassembled and completely rebuilt HP robot is rebuilt and upgraded to HP+ with ceramic bearings Epi chamber completely rebuilt and finished NEW Base ring (wall) is cleaned, tested, and electro-polished NEW Upper and lower clamps are cleaned, tested, and electro-polished NEW Half clamps are cleaned and electro-polished NEW Lamp modules NEW Lamps NEW Gold parts NEW Quartz NEW Graphite NEW Rotate assembly is disassembled and completely rebuilt with NEW bearings, NEW seals, and NEW bellows Gas Panel Completely NEW Gas Panel Enclosure NEW Valves are NEW Filters NEW MFCs are NEW Flow restrictors are NEW Regulators and transducers NEW LDMs NEW All gas lines are NEW All air and water lines NEW All O-rings and seals NEW Flow Point controller and valve NEW (we are the OEM) Blowers NEW Upper AC NEW System controller is completely rebuilt, SCR NEW, Breaker NEW System is fully Tier I tested including heating up lamps before shipping Not included * Scrubbers * PumpsOEM Model Description
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.Documents
APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
Verified
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
60731
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
CATEGORY
Epitaxial deposition (EPI)
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
60731
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available