Description
TEL TACTRAS with VIGUS Ix BSP Chambers Reactive Ion Etcher Excluded Items List (Pumps, Chillers & Abatement are all excluded) Description Quantity PM5 - ESC 1 Description Quantity 0 PM5 - Foreline Pressure Switch(PS3) 1 PM5 ATCC Heater Controller 1 PM5 - ESC High Voltage Power Supply 1 0Configuration
System Type Description Quantity Factory Interface FOUP 3 Options System Nitrogen Purge Storage/Controller 1 Handler System Loader Module YASKAWA Model NXC100 NLM W/S 1 Main System VIGUS Ix BSP Chamber 6 Others N/AOEM Model Description
Tactras™ is a 300mm plasma etch system that enhances etch process productivity. It provides customized solutions for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric etch. The common base product design allows Tactras™ to be built for specific applications. The etch chambers that can be installed on Tactras™ employ optimal design technologies to achieve excellent within-wafer uniformity, low wafer-to-wafer variation, and high selectivity in shaping the etch profile. Up to 6 chambers can be installed on Tactras™, each capable of handling different etch applications as required. Tactras™ offers operational advantages enabled by TEL’s cumulative knowhow on production technology, including a robust design to minimize machine-to-machine and chamber-to-chamber variation, particle reduction technology, unit-assembly inspection, and labor-saving automation. All of these contribute to customers’ productivity.Documents
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Today
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
139495
Wafer Sizes:
12"/300mm
Vintage:
2014
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
TACTRAS
CATEGORY
Dry / Plasma Etch
Last Verified: Today
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
139495
Wafer Sizes:
12"/300mm
Vintage:
2014
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available