Skip to main content
6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
Moov logo

6" Fab For Sale from Moov - Click Here to Learn More
Moov Icon
TEL / TOKYO ELECTRON TACTRAS
    Description
    Poly/RIE(NV/Step)
    Configuration
    Poly/RIE(NV/Step)
    OEM Model Description
    Tactras™ is a 300mm plasma etch system that enhances etch process productivity. It provides customized solutions for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric etch. The common base product design allows Tactras™ to be built for specific applications. The etch chambers that can be installed on Tactras™ employ optimal design technologies to achieve excellent within-wafer uniformity, low wafer-to-wafer variation, and high selectivity in shaping the etch profile. Up to 6 chambers can be installed on Tactras™, each capable of handling different etch applications as required. Tactras™ offers operational advantages enabled by TEL’s cumulative knowhow on production technology, including a robust design to minimize machine-to-machine and chamber-to-chamber variation, particle reduction technology, unit-assembly inspection, and labor-saving automation. All of these contribute to customers’ productivity.
    Documents

    No documents

    TEL / TOKYO ELECTRON

    TACTRAS

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    97975


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    TEL / TOKYO ELECTRON TACTRAS

    TEL / TOKYO ELECTRON

    TACTRAS

    Dry / Plasma Etch
    Vintage: 2012Condition: Used
    Last VerifiedOver 60 days ago

    TEL / TOKYO ELECTRON

    TACTRAS

    verified-listing-icon
    Verified
    CATEGORY
    Dry / Plasma Etch
    Last Verified: Over 60 days ago
    listing-photo-66a15707567d44b38eeb4a836bb4bb8a-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    97975


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Poly/RIE(NV/Step)
    Configuration
    Poly/RIE(NV/Step)
    OEM Model Description
    Tactras™ is a 300mm plasma etch system that enhances etch process productivity. It provides customized solutions for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric etch. The common base product design allows Tactras™ to be built for specific applications. The etch chambers that can be installed on Tactras™ employ optimal design technologies to achieve excellent within-wafer uniformity, low wafer-to-wafer variation, and high selectivity in shaping the etch profile. Up to 6 chambers can be installed on Tactras™, each capable of handling different etch applications as required. Tactras™ offers operational advantages enabled by TEL’s cumulative knowhow on production technology, including a robust design to minimize machine-to-machine and chamber-to-chamber variation, particle reduction technology, unit-assembly inspection, and labor-saving automation. All of these contribute to customers’ productivity.
    Documents

    No documents

    Similar Listings
    View All
    TEL / TOKYO ELECTRON TACTRAS

    TEL / TOKYO ELECTRON

    TACTRAS

    Dry / Plasma EtchVintage: 2012Condition: UsedLast Verified:Over 60 days ago
    TEL / TOKYO ELECTRON TACTRAS

    TEL / TOKYO ELECTRON

    TACTRAS

    Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:23 days ago
    TEL / TOKYO ELECTRON TACTRAS

    TEL / TOKYO ELECTRON

    TACTRAS

    Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:Over 60 days ago