Description
ETCHConfiguration
3CHOEM Model Description
Trias SPA is a 300mm version of plasma nitridation system. The new system can also be used for oxidation processes. The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. By optimizing the slot configuration of the antenna, the plasma distribution can be adjusted to achieve excellent uniformity, which is comparable to those obtained with advanced furnace technology.Documents
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TEL / TOKYO ELECTRON
TRIAS SPA
Verified
CATEGORY
Deposition
Last Verified: 13 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
75752
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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TEL / TOKYO ELECTRON
TRIAS SPA
CATEGORY
Deposition
Last Verified: 13 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
75752
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
ETCHConfiguration
3CHOEM Model Description
Trias SPA is a 300mm version of plasma nitridation system. The new system can also be used for oxidation processes. The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. By optimizing the slot configuration of the antenna, the plasma distribution can be adjusted to achieve excellent uniformity, which is comparable to those obtained with advanced furnace technology.Documents
No documents