Used TEL / TOKYO ELECTRON TRIAS SPA Equipment | Moov

Something went wrong. Try refreshing the page, and contact support@moov.co if the problem persists.

Skip to main content

We value your privacy

We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. Read More

Messages

VIEW ALL MESSAGES

Messages

listing-image-

Messages including contact info may not be shared. We scan, review, and reserve the right to remove sensitive information from all messages to prevent fraud and policy violations.All messages subject to review, review our policy for more info.

Marketplace > Deposition > TEL / TOKYO ELECTRON > TRIAS SPA

TEL / TOKYO ELECTRON

TRIAS SPA

Category

Overview

The TEL (Tokyo Electron) Trias SPA is a single-wafer plasma processing system designed for semiconductor manufacturing. It utilizes Tokyo Electron's Slot Plane Antenna (SPA) technology to generate high-density, low-electron-temperature plasma, enabling low-damage, low-temperature plasma treatments. This system is particularly suited for critical front-end-of-line (FEOL) applications, including gate nitridation, gate recovery oxidation, and shallow trench isolation (STI) liner oxidation.

Active Listings

4

Services

Inspection, Insurance, Appraisal, Logistics

Top Listings

Have one like this?

List it with Moov and find the perfect buyer in no time at all.