Description
Al PVDConfiguration
TMP(turbo Pump) MFC(flow control) RF ESC/HEATER Chamber 1 LAM Chamber/Q300 Ti/TiN Chamber 2 LAM Chamber/HCM Ti Chamber 3 LAM Chamber/Q300 Al Chamber 5 LAM Chamber/Q300 Al Chamber 6 LAM Chamber/HCM Ti Chamber 7 LAM Chamber/Q300 Ti/TiNOEM Model Description
The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).Documents
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LAM RESEARCH / NOVELLUS
INOVA xT
Verified
CATEGORY
Deposition
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
95975
Wafer Sizes:
12"/300mm
Vintage:
Unknown
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Logistics Support
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Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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LAM RESEARCH / NOVELLUS
INOVA xT
Verified
CATEGORY
Deposition
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
95975
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Al PVDConfiguration
TMP(turbo Pump) MFC(flow control) RF ESC/HEATER Chamber 1 LAM Chamber/Q300 Ti/TiN Chamber 2 LAM Chamber/HCM Ti Chamber 3 LAM Chamber/Q300 Al Chamber 5 LAM Chamber/Q300 Al Chamber 6 LAM Chamber/HCM Ti Chamber 7 LAM Chamber/Q300 Ti/TiNOEM Model Description
The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).Documents
No documents