The INOVA xT is a 300mm version of INOVA with proven HCM extendability to the 0.10-micron technology node. It has an industry-leading throughput of 100 wafers per hour (wph).

Lam Research is a leading supplier of plasma etch- and single-wafer clean equipment that plays a pivotal role in defining the features and capabilities of next-generation semiconductor devices. With the addition of Novellus' innovative thin-film deposition and surface preparation product lines, the new Lam Research is well-positioned within the industry to support critical technology transitions including 3D structures in advanced logic and NAND memory, as well as the scaling to 450 mm wafers.

LAM RESEARCH / NOVELLUS

INOVA xT

Tool Configuration:
- MAG7 Brooks Robots
- MC3 Novellus Module controller
- Pfeiffer Turbo and turbo controller
- 3 CTI/Hilex/Brooks Cryo pump
- Brooks FOUP cassette wafer loader
- VAT throttle valve and controllers
- AE PDX 5000 RF Generator
- AE RFG 5500 RF Generator
- MKS RF Generator
- DC power supply
- Right Degas Chamber
- PVD chamber
- Preclean Chamber
- Left Degas Chamber
- Transfer Module with dual blade
- And many more (details attached)

Parts List Cont..xlsx

B1CC24D4-C8D3-4670-8383-1C5549EA14A4.jpeg

28DCA139-2E06-4E3F-B059-3765C6B63ADB_1_201_a.jpeg

7D394F4A-B0DE-4E06-95B4-742CC165EFE5.jpeg

381569CB-4781-49FE-A18C-72F99DDB4B14_1_201_a.jpeg

D344A446-33CD-438B-B66D-93AA0EBC43A1_1_201_a.jpeg

E3C4F79B-13D4-4B54-A5BE-E0F4C020F720.jpeg

EC6A5108-5F2E-4BD3-9402-92A79B3258CA.jpeg

F1332BCD-ACEF-4E92-9792-C43CBD998A50_1_201_a.jpeg

18DC5506-33E5-4642-B5B8-DA68AD7ABFD7_1_201_a.jpeg

56EC22D9-3574-4999-83C2-956BD0D5E615_1_201_a.jpeg

00FBAABE-EB61-4E4C-9674-021655A0C864.jpeg

001650CA-F977-449B-A22D-4E2B4929CEBB_1_201_a.jpeg

INOVA xT

Category

Overview

Active Listings

Services

Top Listings

List it with Moov and find the perfect buyer in no time at all.