Description

Process - Non-Pattern Particle Inspection

Configuration

Wafer Type: Bare and film Wafer Loader: 300mm Dual FIMS SW Version: NGS Version 5.20 Build 1153 Option: Nomal / ST / HS / Nomal(Oblique)

OEM Model Description

The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.

Documents

KLA SURFSCAN SP2.pdf

KLA

SURFSCAN SP2

Verified

Defect Inspection

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Installed / Running

Product ID:

130822

Wafer Sizes:

12"/300mm

Vintage:

2007

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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