Description

The Surfscan ® SP2 systems are the 2nd generation of KLA’s revolutionary Surfscan SP1 platform for unpatterned wafer inspection. Incorporating revolutionary ultraviolet (UV) laser technology, new darkfield optics and advanced algorithms, the Surfscan SP2 finds defects as small as 37nm, and throughputs up to 2x faster than the prior generation tool at the same sensitivity. Designed for emerging technologies such as RF, automotive, and mature process nodes to the ≥4xnm design rule, the SP2 facilitates the qualification and monitoring of processes and tools required by substrate, IC, equipment and materials manufacturers across the semiconductor ecosystem.

Configuration

PARTICLE INSPECTION Configuration No. Description Component 1 Main body 1 set including stage, laser, optic system, sensor etc. 2 Handler 1 set including robot, arm, loadport, controller etc. 3 UI Integrated type including monitor, trackball, keyboard etc. 4 Blower 1 set Item Specification Wafer size 300mm Load/Unload Automatic Illumination Oblique/Normal Channel Narrow/Wide Scan mode Oblique/Wide: 37nm HS/42nm ST/47nm HT Oblique/Narrow: 60nm HS/70nm ST/80nm HT Normal/Wide: 61nm HS/68nm ST/72nm HT Normal/Narrow: 78nm HS/83nm ST/93nm HT Uniformity For Calibrated PSL size <50nm ± 1nm For Calibrated PSL size 50nm ≤size <200nm ±2% For Calibrated PSL 200nm ≤size ≤260nm ±5% For Calibrated PSL size >260nm ±7% Repeatability Count: CV* ≤ 1%, for mean count > 5000 *CV = coefficient of variance, σ/µ Contamination ≤0.001 particles (≥0.1 µm)/cm 2 /pass frontside Dimension Main body+UI 720(W)*2100(D)*1850(H)mm Handler 1250(W)*1685(D)*1850(H)mm Blower 500(W)*300(D)*300(H)mm Working Condition Item Specification Temperature 20~24℃ Humidity 26~95% non-condensing Clean room Class 10 or better Electrical Power 200VAC-240VAC, 50/60Hz, Single phase, three wire 30Amps RMS CDA 85-105 psi(0.586-0.724 MPa)@ 1 SCFM(28.3LPM) 90 psi(0.625 MPa) of CDA @ 0.36 SCFM(10 LPM) Vacuum 510~762mm Hg; 1 cfm (28.3LPM) 510mm Hg; 0.2 cfm (5.7LPM) (flexible 1/8” ID, ¼” OD vacuum hose) Clearance front:714mm back:600mm left:600mm right:600mm Venting and Exhaust System cooling: 100 cfm at 0.5” H2O, 4.5’’ inches holes Laser cooling: 50 cfm at 1.4” H2O, 4.5’’ inches holes Vibration frequencies <100 Hz, velocity ≤ 0.076 cm/s (0.030 in/s). frequencies >100 Hz, acceleration ≤ 0.050g.

OEM Model Description

The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.

Documents

KLA TENCOR SP2.pdf

KLA

SURFSCAN SP2

Verified

Defect Inspection

Last Verified: 3 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

137354

Wafer Sizes:

8"/200mm, 12"/300mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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