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Description
HDD included New laser Unpatterned Wafer Surface Inspection SystemConfiguration
• Includes 300/200mm Phoenix Dual OCL Vacuum Wafer Handler (PP) • Ballroom Config (Standard) • Configured for MCCB (US/EU) Power Inlet • Oblique Incidence Illumination • High Sensitivity Inspect Mode • Std Throughput Inspection mode • Optical Filter • Enhanced XY Coordinates enabled • Classification：Standard /LPD-N/LPD-ES • Grading and Sorting: 20 Degree, 40 Degree, Rough Films Haze Enabled • Haze Normalization Enabled • Haze Analysis Enabled • Haze Line Classification Enabled • NFS Client Software Package • NGS Desktop Software PackageOEM Model Description
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.Documents
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Verified
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
108659
Wafer Sizes:
Unknown
Vintage:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SURFSCAN SP2
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
108659
Wafer Sizes:
Unknown
Vintage:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
HDD included New laser Unpatterned Wafer Surface Inspection SystemConfiguration
• Includes 300/200mm Phoenix Dual OCL Vacuum Wafer Handler (PP) • Ballroom Config (Standard) • Configured for MCCB (US/EU) Power Inlet • Oblique Incidence Illumination • High Sensitivity Inspect Mode • Std Throughput Inspection mode • Optical Filter • Enhanced XY Coordinates enabled • Classification：Standard /LPD-N/LPD-ES • Grading and Sorting: 20 Degree, 40 Degree, Rough Films Haze Enabled • Haze Normalization Enabled • Haze Analysis Enabled • Haze Line Classification Enabled • NFS Client Software Package • NGS Desktop Software PackageOEM Model Description
The Surfscan SP2 is an unpatterned wafer surface inspection tool that uses UV laser technology, darkfield optics, and advanced algorithms to detect defects as small as 30nm. It provides high sensitivity detection on engineered substrates and has a significant throughput increase over the prior-generation tool. It offers a single tool solution for three technology nodes and has comprehensive wafer surface inspection capabilities. It also enables faster root-cause analysis with improved coordinate accuracy and real-time defect classification capability.Documents
No documents