Description
ParticleConfiguration
ParticleOEM Model Description
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.Documents
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KLA
SP1 DLS
Verified
CATEGORY
Defect Inspection
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
98045
Wafer Sizes:
Unknown
Vintage:
Unknown
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KLA
SP1 DLS
Verified
CATEGORY
Defect Inspection
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
98045
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
ParticleConfiguration
ParticleOEM Model Description
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.Documents
No documents