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KLA AIT UV
  • KLA AIT UV
  • KLA AIT UV
  • KLA AIT UV
Description
Darkfield inspection
Configuration
No Configuration
OEM Model Description
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.
Documents

No documents

KLA

AIT UV

verified-listing-icon

Verified

CATEGORY
Defect Inspection

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

112938


Wafer Sizes:

12"/300mm


Vintage:

2006


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

KLA

AIT UV

verified-listing-icon
Verified
CATEGORY
Defect Inspection
Last Verified: Over 60 days ago
listing-photo-7cf08a554a7749f6ad909af3315b1601-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

112938


Wafer Sizes:

12"/300mm


Vintage:

2006


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Darkfield inspection
Configuration
No Configuration
OEM Model Description
AIT UV™ is a high-throughput, high-sensitivity wafer inspection product that uses Dual AOD technology to increase scan rate, UV laser illumination for increased sensitivity, and advanced detection algorithms for improved defect capture. It also features real-time Adaptive Mode™ technology, three-channel double-darkfield optics, MultiSpot™ illumination, and Inline Automatic Defect Classification (iADC) for faster results. It is part of KLA-Tencor’s AIT family of inspection systems and is designed for 300-mm inspection and excursion monitoring at 100-nm design rules and below.
Documents

No documents