Description
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3 PMs (8" Convertible) Robot : Brooks Metal PVD deposition Process (Product ): Sputtering Process Modules Configuration 1. Cassette Load Lock Modules -Come with 3 casettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, -Leybold TMP/NT 150/360V/H turbo pump 2. Desorb Modules For wafers orientation and lamps heating, Leybold TMP/NT 150/360V/H turbo pump 3. Transport Modules Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot. Leybold TMP 151/361, 600 and 1000 turbo pump. 4. PVDCathode -AE MDX Magatron DrivePower Supply . -CTI cryo on board 8 and 8300 compressor. -VAT Gate valve series 14 -AlCu target 14” diameter 5. PVD Cathode Same as 4. TaAl target 14” diameterOEM Model Description
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.Documents
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LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
Verified
CATEGORY
CVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
63716
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS
CONCEPT TWO "C2"
CATEGORY
CVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
63716
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
3 PMs (8" Convertible) Robot : Brooks Metal PVD deposition Process (Product ): Sputtering Process Modules Configuration 1. Cassette Load Lock Modules -Come with 3 casettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, -Leybold TMP/NT 150/360V/H turbo pump 2. Desorb Modules For wafers orientation and lamps heating, Leybold TMP/NT 150/360V/H turbo pump 3. Transport Modules Brooks MultiTran 5 Bi-symmetric frog-leg type dual arm robot. Leybold TMP 151/361, 600 and 1000 turbo pump. 4. PVDCathode -AE MDX Magatron DrivePower Supply . -CTI cryo on board 8 and 8300 compressor. -VAT Gate valve series 14 -AlCu target 14” diameter 5. PVD Cathode Same as 4. TaAl target 14” diameterOEM Model Description
The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.Documents
No documents