LAM RESEARCH / NOVELLUS CONCEPT TWO "C2"

Description

Dual Sequel TEOS, Non Shrink

Configuration

Dual Sequel TEOS, Non Shrink

OEM Model Description

The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.