LAM RESEARCH / NOVELLUS CONCEPT TWO "C2" SPEED

Description

Missing Parts: ESC, AUTO Matcher, Capacitor Matcher, Differential Pressure Gauge, Turbo Controller, NTM-DELTA,L/L Door Slit Assembly, Lift Up/Down Sensor, Lower Matching Box, IOC-0, PLC Unit Power Supply, NTM-DELTA Power Adapter, HRF Power Supply, LRF Power Supply, HRF Switching Box, Coaxial Cable, Backside He_MFC, Turbo Gate Valve Body

Configuration

2 channels, includes: PFC detoxification

OEM Model Description

The Concept Two SPEED is a Novellus product that is designed for 200 mm wafers. It features a hemispherical source that is patented and delivers high throughput and manufacturability. The hemispherical source has a single excitation frequency and coil, which makes it simpler and more elegant than other systems that require multiple coils to approach the ion uniformity level of SPEED. The Concept Two SPEED is an HDP CVD system with three chambers that can accommodate the high pumping speeds required to operate at the mTorr pressures necessary for these CVD processes .

Documents

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LAM RESEARCH / NOVELLUS

CONCEPT TWO "C2" SPEED

Verified

CVD

Last Verified: 14 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

143505

Wafer Sizes:

8"/200mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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