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Marketplace > CVD > LAM RESEARCH / NOVELLUS > CONCEPT TWO "C2" SEQUEL EXPRESS

CONCEPT TWO "C2" SEQUEL EXPRESS

Category
CVD
Overview

SEQUEL EXPRESS is an advanced version of the SEQUEL system designed to deposit Novellus’ CORAL family of low-k dielectric films, as well as all other advanced films required for 0.18-micron and smaller devices. With a throughput in excess of 110 wafers per hour, SEQUEL EXPRESS delivers up to 40 percent higher capital productivity.

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