The WJ-999 is a product from Watkins Johnson. It is an Atmospheric Pressure CVD with 3 process chambers for TEOS and hydride processes. It is used for depositing doped or undoped silicon dioxide (SiO2) films, created from either the TEOS/Ozone or Silane/Oxygen CVD reaction.

AVIZA / WATKINS-JOHNSON

WJ-999

WJ 999.xlsx

Missing Parts:
1-1 988 temperature controller
1-2 MKS valve 253B-11010
1-3 Handler DC power supply, Power One SPL130-4101P
1-4 Flowmeter, Porter 15lpm B-125-20
1-5 PLC CPU module, Koyo Direct 305 CPU DL-330
1-6 905434-002 orifice, toroidal, 3/8” –APL

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WJ 999 configuration.pdf

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