Description

2 coat cups, 1 adhesion hot plates, 2 DHP, 6 Low temp hot plate, 3 chill plates Left, 2C, 1AD, 2DHP, 6HP, 3COL Main Frame: Single Block LD: 3ea, modified to Fortrend

Configuration

2 develop cups, 9 Low temp Hot plates, 3 chill plates, WEE Right, 2D, 1WEE, 9HP, 3COL Main Frame: Dual Block

OEM Model Description

Discover the CLEAN TRACK Mark 8, the cutting-edge coater developer system for 5 to 8-inch wafers. Building on the legacy of the acclaimed Mark V, this advanced model delivers enhanced productivity, superior scalability, and exceptional environmental control. Perfect for R&D and high-volume manufacturing, the Mark 8 ensures stable, top-tier performance for diverse applications.

Documents

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TEL / TOKYO ELECTRON

MARK 8

Verified

Coaters & Developers

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

105225

Wafer Sizes:

8"/200mm

Vintage:

1998

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