Description
- Left to Right - Wafer & Carrier Type: 12", FOUP, 25 slots - System Power Rating: AC 208V, 3-phase for system - Loading Configuration: 4 Loader - Software Version: Power off - Main Controller: #4 - No HDDConfiguration
Please see attached configurationOEM Model Description
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.Documents
TEL / TOKYO ELECTRON
ACT 12
Verified
CATEGORY
Coaters & Developers
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
83215
Wafer Sizes:
12"/300mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
TEL / TOKYO ELECTRONACT 12Coaters & Developers
Vintage: 0Condition: Used
Last VerifiedOver 30 days ago
TEL / TOKYO ELECTRONACT 12Coaters & Developers
Vintage: 0Condition: Used
Last VerifiedOver 30 days ago
TEL / TOKYO ELECTRONACT 12Coaters & Developers
Vintage: 0Condition: Used
Last VerifiedOver 30 days ago
TEL / TOKYO ELECTRONACT 12Coaters & Developers
Vintage: 0Condition: Used
Last VerifiedOver 60 days ago
TEL / TOKYO ELECTRON
ACT 12
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
83215
Wafer Sizes:
12"/300mm
Vintage:
2003
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
- Left to Right - Wafer & Carrier Type: 12", FOUP, 25 slots - System Power Rating: AC 208V, 3-phase for system - Loading Configuration: 4 Loader - Software Version: Power off - Main Controller: #4 - No HDDConfiguration
Please see attached configurationOEM Model Description
The CLEAN TRACK™ ACT™ 12 is a 300mm coater/developer that enables stable, high-quality processing and smooth transition from R&D to volume production. It is an in-line model with an exposure tool that has almost the same footprint as the previous track series, but provides higher throughput due to its high-speed transfer system. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. Additionally, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. This makes it a powerful tool for achieving consistent results in both research and production environments.Documents
Similar Listings
View AllTEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: 0Condition: UsedLast Verified: Over 30 days agoTEL / TOKYO ELECTRON
ACT 12
Coaters & DevelopersVintage: 0Condition: UsedLast Verified: Over 30 days agoTEL / TOKYO ELECTRON