Description
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The 88 series uses an enhanced in-line robotic transfer arm between each module which makes critical transfers, such as between soft bake and chill, much more easily controlled compared to a totally random robotic system. The 88 Series is ideal for submicron manufacturing and is capable of processing 3″ through 150 mm substrates including Silicon, GaAs, Sapphire, GGG, Lithium Niobate, thin film heads, MEMS and many other substrate types.Documents
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RITE TRACK / ASML / SVG
88
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
52293
Wafer Sizes:
Unknown
Vintage:
Unknown
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RITE TRACK / ASML / SVG
88
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
52293
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The 88 series uses an enhanced in-line robotic transfer arm between each module which makes critical transfers, such as between soft bake and chill, much more easily controlled compared to a totally random robotic system. The 88 Series is ideal for submicron manufacturing and is capable of processing 3″ through 150 mm substrates including Silicon, GaAs, Sapphire, GGG, Lithium Niobate, thin film heads, MEMS and many other substrate types.Documents
No documents