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Description
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upgrade of the SVG88 to the DUNA 700 The upgrade of the SVG88 to the DUNA 700 includes: • NetTrack Recipe Management Software inside • Dual Track • NetTrack CPU board • 3 refurbished CYBOR photo resist pumps with controller • Brushless motor and servo controller • 4” size conversion kit • There is Windows XP PC 2pcs (develop/resist) Originally there was no PC. Specification Wafer size: capable up to 6” wafer and set up to 6” wafer Wafer type: Silicon round wafer Wafer flow: left to right Power: 220/240V, Single Phase, 50/60Hz Rear of the cabinet facilities access Standard poly floors Teflon insulated mainframe wiring NetTrack CPU Board Direct interchangeable with SVG CPU Can store up to 99 programs Capable component exercise NetTrack Recipe Management Compatible to SVG86/88 Series Track system Unlimited recipe storage and secure on PC hard disk Real-time process alarm & event capturing and information display Network host recipe data automation *additional details attached belowOEM Model Description
The 88 series uses an enhanced in-line robotic transfer arm between each module which makes critical transfers, such as between soft bake and chill, much more easily controlled compared to a totally random robotic system. The 88 Series is ideal for submicron manufacturing and is capable of processing 3″ through 150 mm substrates including Silicon, GaAs, Sapphire, GGG, Lithium Niobate, thin film heads, MEMS and many other substrate types.Documents
Verified
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
106599
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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RITE TRACK / ASML / SVG
88
CATEGORY
Coaters & Developers
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
106599
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available