Overview

The CLEAN TRACK™ ACT™ 8 is 200mm coater/developer which enable stable, high-quality processing and smooth transition from R&D to volume production. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. In addition, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. First Generation ACT, successor to Mark Series <- 8 refers to 8 inch (200mm) wafers.