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ACT 12

Overview

The CLEAN TRACK™ ACT™ 12 is 300mm coater/developer which enable stable, high-quality processing and smooth transition from R&D to volume production. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. In addition, the platform supports DUV processing through the use of a ULPA chemical filter and a high precision oven. Upgraded ACT to handle 12 inch (300mm) wafers.

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29

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