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OXFORD Opal-PEALD
    Description
    No description
    Configuration
    details attached. -the endcap drive gear motors should be replaced - Following gases connected: H2, NH3, O2, Ar, N2, TMA (Trimethylaluminum) was our aluminum source. We deposited only Al2O3 in this system - Substrate holder: (240mm) resistance-heated (up to 400C) - Remote Plasma source: 300W capacity at 13.56MHz (RF generator and automatic matching unit included) - Metal Precursors delivery: (2) Bubbler and (2) vapor drawn - Gas lines: Non-toxic gas lines (3 lines) and toxic gas lines (2 lines). Each gas line is equipped with its individual MFC. - Water delivery kit included - Ozone generator included. - Vacuum gauges: 1000mT CM gauge + Penning - Pumps: dry pump with precursor foreline trap fitted - Pumping pipe work: 40mm (heating kit included)
    OEM Model Description
    None Provided
    Documents
    File icon

    OpAl ALD.pdf

    OXFORD

    Opal-PEALD

    verified-listing-icon

    Verified

    CATEGORY
    ALD

    Last Verified: Over 30 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    49566

    Wafer Sizes:

    Unknown

    Vintage:

    2015

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
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    OXFORD Opal-PEALD

    OXFORD

    Opal-PEALD

    ALD
    Vintage: 2015Condition: Used
    Last VerifiedOver 30 days ago

    OXFORD

    Opal-PEALD

    verified-listing-icon
    Verified
    CATEGORY
    ALD
    Last Verified: Over 30 days ago
    listing-photo-a2db59a39c994782b5d4745e0dd56eab-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/45918/a2db59a39c994782b5d4745e0dd56eab/c1fd9958f5f04c0d8a1b7c0ea13b4555_f2f5b23ddf3648caa2fd656d9eac43641105c_mw.jpeg
    listing-photo-a2db59a39c994782b5d4745e0dd56eab-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/45918/a2db59a39c994782b5d4745e0dd56eab/c5d62f0d971e43e1991d3a6c824293c0_c131035f63744c8aaf88ea7c2d05ff7f1105c_mw.jpeg
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    listing-photo-a2db59a39c994782b5d4745e0dd56eab-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/45918/a2db59a39c994782b5d4745e0dd56eab/b8d66e5f947f41019003766060935690_6a89be57d6b745dfb04de41477b7b6aa1105c_mw.jpeg
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    listing-photo-a2db59a39c994782b5d4745e0dd56eab-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2046/a2db59a39c994782b5d4745e0dd56eab/fdc5c2d9cacd4ef2bcf145f57792d79f_70a6b19bdbc541f2b705df0858d51ba31105c_mw.jpeg
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    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    49566

    Wafer Sizes:

    Unknown

    Vintage:

    2015

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    details attached. -the endcap drive gear motors should be replaced - Following gases connected: H2, NH3, O2, Ar, N2, TMA (Trimethylaluminum) was our aluminum source. We deposited only Al2O3 in this system - Substrate holder: (240mm) resistance-heated (up to 400C) - Remote Plasma source: 300W capacity at 13.56MHz (RF generator and automatic matching unit included) - Metal Precursors delivery: (2) Bubbler and (2) vapor drawn - Gas lines: Non-toxic gas lines (3 lines) and toxic gas lines (2 lines). Each gas line is equipped with its individual MFC. - Water delivery kit included - Ozone generator included. - Vacuum gauges: 1000mT CM gauge + Penning - Pumps: dry pump with precursor foreline trap fitted - Pumping pipe work: 40mm (heating kit included)
    OEM Model Description
    None Provided
    Documents
    File icon

    OpAl ALD.pdf

    Similar Listings
    View All
    OXFORD Opal-PEALD

    OXFORD

    Opal-PEALD

    ALDVintage: 2015Condition: UsedLast Verified: Over 30 days ago