Description
No descriptionConfiguration
2 Oum Lens Robotic Wafer Handlers- 200mm and 300mm capable Environmental Chamber. Reticle Library 44 x 26.7 mm Light pipe 1000 Watt Illumination Through the lens alignment Automatic enhanced global alignment Air probe focus detection 3-Point focus detection Linear motor XY stage MVS Pattern recognition system Closed loop exposure dose control system Vibration isolation system Auto-uniformity Dynamic focus SECS II compatibility Special bottom-side prism protection pellicle Dual flip aperture broadband Intensity 1650mW Uniformity 7% DOF 2um De-installed.OEM Model Description
The UltraTech Saturn Spectrum 300 is a stepper system used in the fabrication of semiconductors. It can handle wafers that are between 8" and 12" in size and has a resolution of 2.0 microns. The system is equipped with a robotic wafer handler, an environmental chamber, and a reticle library, as well as a light pipe that measures 44 x 26.7 mm. The illuminator can be either 1000w or 1200w and the lens alignment is automatic with enhanced global alignment. Additionally, the UltraTech Saturn Spectrum 300 features an air probe focus detector, a 3-point focus detector, and a linear motor for the X and Y stage. It also includes an MVS pattern recognition system, a closed-loop exposure dose controller, a vibration isolation system, auto-uniformity, and dynamic focus. The system is SECS II compatible and has bottom-side prism protection pellicle, dual flip aperture broadband, an intensity of 1650mW, uniformity of 7%, and a DOF of 2µm.Documents
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VEECO / ULTRATECH
SATURN SPECTRUM 300
Verified
CATEGORY
Photolithography
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
31550
Wafer Sizes:
12"/300mm
Vintage:
Unknown
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VEECO / ULTRATECH
SATURN SPECTRUM 300
Verified
CATEGORY
Photolithography
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
31550
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
2 Oum Lens Robotic Wafer Handlers- 200mm and 300mm capable Environmental Chamber. Reticle Library 44 x 26.7 mm Light pipe 1000 Watt Illumination Through the lens alignment Automatic enhanced global alignment Air probe focus detection 3-Point focus detection Linear motor XY stage MVS Pattern recognition system Closed loop exposure dose control system Vibration isolation system Auto-uniformity Dynamic focus SECS II compatibility Special bottom-side prism protection pellicle Dual flip aperture broadband Intensity 1650mW Uniformity 7% DOF 2um De-installed.OEM Model Description
The UltraTech Saturn Spectrum 300 is a stepper system used in the fabrication of semiconductors. It can handle wafers that are between 8" and 12" in size and has a resolution of 2.0 microns. The system is equipped with a robotic wafer handler, an environmental chamber, and a reticle library, as well as a light pipe that measures 44 x 26.7 mm. The illuminator can be either 1000w or 1200w and the lens alignment is automatic with enhanced global alignment. Additionally, the UltraTech Saturn Spectrum 300 features an air probe focus detector, a 3-point focus detector, and a linear motor for the X and Y stage. It also includes an MVS pattern recognition system, a closed-loop exposure dose controller, a vibration isolation system, auto-uniformity, and dynamic focus. The system is SECS II compatible and has bottom-side prism protection pellicle, dual flip aperture broadband, an intensity of 1650mW, uniformity of 7%, and a DOF of 2µm.Documents
No documents
Similar Listings
View AllVEECO / ULTRATECH
SATURN SPECTRUM 300
PhotolithographyVintage: 0Condition: UsedLast Verified: 30 days agoVEECO / ULTRATECH
SATURN SPECTRUM 300
PhotolithographyVintage: 0Condition: UsedLast Verified: Over 60 days agoVEECO / ULTRATECH