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VEECO / ULTRATECH SATURN SPECTRUM 300
    Description
    EXPOSE TOOL, SIP
    Configuration
    No Configuration
    OEM Model Description
    The UltraTech Saturn Spectrum 300 is a stepper system used in the fabrication of semiconductors. It can handle wafers that are between 8" and 12" in size and has a resolution of 2.0 microns. The system is equipped with a robotic wafer handler, an environmental chamber, and a reticle library, as well as a light pipe that measures 44 x 26.7 mm. The illuminator can be either 1000w or 1200w and the lens alignment is automatic with enhanced global alignment. Additionally, the UltraTech Saturn Spectrum 300 features an air probe focus detector, a 3-point focus detector, and a linear motor for the X and Y stage. It also includes an MVS pattern recognition system, a closed-loop exposure dose controller, a vibration isolation system, auto-uniformity, and dynamic focus. The system is SECS II compatible and has bottom-side prism protection pellicle, dual flip aperture broadband, an intensity of 1650mW, uniformity of 7%, and a DOF of 2µm.
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    VEECO / ULTRATECH

    SATURN SPECTRUM 300

    verified-listing-icon

    Verified

    CATEGORY
    Photolithography

    Last Verified: Over 30 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    101698


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown

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    VEECO / ULTRATECH SATURN SPECTRUM 300

    VEECO / ULTRATECH

    SATURN SPECTRUM 300

    Photolithography
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    VEECO / ULTRATECH

    SATURN SPECTRUM 300

    verified-listing-icon
    Verified
    CATEGORY
    Photolithography
    Last Verified: Over 30 days ago
    listing-photo-43267f246561419b94170e54b851b60f-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    101698


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown


    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    EXPOSE TOOL, SIP
    Configuration
    No Configuration
    OEM Model Description
    The UltraTech Saturn Spectrum 300 is a stepper system used in the fabrication of semiconductors. It can handle wafers that are between 8" and 12" in size and has a resolution of 2.0 microns. The system is equipped with a robotic wafer handler, an environmental chamber, and a reticle library, as well as a light pipe that measures 44 x 26.7 mm. The illuminator can be either 1000w or 1200w and the lens alignment is automatic with enhanced global alignment. Additionally, the UltraTech Saturn Spectrum 300 features an air probe focus detector, a 3-point focus detector, and a linear motor for the X and Y stage. It also includes an MVS pattern recognition system, a closed-loop exposure dose controller, a vibration isolation system, auto-uniformity, and dynamic focus. The system is SECS II compatible and has bottom-side prism protection pellicle, dual flip aperture broadband, an intensity of 1650mW, uniformity of 7%, and a DOF of 2µm.
    Documents

    No documents

    Similar Listings
    View All
    VEECO / ULTRATECH SATURN SPECTRUM 300

    VEECO / ULTRATECH

    SATURN SPECTRUM 300

    PhotolithographyVintage: 0Condition: UsedLast Verified: Over 60 days ago
    VEECO / ULTRATECH SATURN SPECTRUM 300

    VEECO / ULTRATECH

    SATURN SPECTRUM 300

    PhotolithographyVintage: 2004Condition: UsedLast Verified: Over 60 days ago
    VEECO / ULTRATECH SATURN SPECTRUM 300

    VEECO / ULTRATECH

    SATURN SPECTRUM 300

    PhotolithographyVintage: 0Condition: UsedLast Verified: Over 30 days ago