Description
Single Wafer ProcessingConfiguration
Vintage 2011, this system has already undergone extensive refurbishment Included: FFU RDM (installed but can be removed) Exhaust Up Ultrasonic Flowmeter 5 x Lauda Heat Exchanger (=max possible) Standard Handling 200mm N2 / DI included in Med Arm Standard Pin Chuck 200mm (NC type) Open Cassette Shutter Front and Rear Keyboard & Display 3xCDS Type āEā including RAID controller 400V AC Transformator if needed * Chuckdrive / Elevating unit bearings & motors & toothed belts * robot controller ESC200 * Brooks robot ATM407B * ECO Gripper moving parts * Lauda heat exchangers * Ionizer spikes * Chuck Pins * some CAN bus modules * Keyboard and KVM switch * partly chemical valves * SW backup Main Unit & CDS includedOEM Model Description
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.Documents
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LAM RESEARCH / SEZ
SP203
Verified
CATEGORY
Wet Etch
Last Verified: 19 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
83131
Wafer Sizes:
8"/200mm
Vintage:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
SP203
CATEGORY
Wet Etch
Last Verified: 19 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
83131
Wafer Sizes:
8"/200mm
Vintage:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Single Wafer ProcessingConfiguration
Vintage 2011, this system has already undergone extensive refurbishment Included: FFU RDM (installed but can be removed) Exhaust Up Ultrasonic Flowmeter 5 x Lauda Heat Exchanger (=max possible) Standard Handling 200mm N2 / DI included in Med Arm Standard Pin Chuck 200mm (NC type) Open Cassette Shutter Front and Rear Keyboard & Display 3xCDS Type āEā including RAID controller 400V AC Transformator if needed * Chuckdrive / Elevating unit bearings & motors & toothed belts * robot controller ESC200 * Brooks robot ATM407B * ECO Gripper moving parts * Lauda heat exchangers * Ionizer spikes * Chuck Pins * some CAN bus modules * Keyboard and KVM switch * partly chemical valves * SW backup Main Unit & CDS includedOEM Model Description
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.Documents
No documents