Description
OnTrak DSS-200 CMP Double Sided Brush Cleaner. Double sided wafer cleaner for post CMP cleaning. The DSS-200 scrubs, rinses and dries 4”, 6” or 8” (100, 150 or 200mm) wafers. System is currently configured for 6" by 6" squares. Parts needed to change sizes. Consists of system electronics, a send indexer, a brush cleaning station, spin station and robotic edge handling receive indexer. Wafers are DI sprayed while in sender, moved to brush stations where they are cleaned by top and bottom brushes with DI and/or cleaning chemistry. In spinning station they are DI rinsed and dried. CE marking.Configuration
OnTrak DSS-200 CMP Double Sided Brush Cleaner. Double sided wafer cleaner for post CMP cleaning. The DSS-200 scrubs, rinses and dries 4”, 6” or 8” (100, 150 or 200mm) wafers. System is currently configured for 6" by 6" squares. Parts needed to change sizes. Consists of system electronics, a send indexer, a brush cleaning station, spin station and robotic edge handling receive indexer. Wafers are DI sprayed while in sender, moved to brush stations where they are cleaned by top and bottom brushes with DI and/or cleaning chemistry. In spinning station they are DI rinsed and dried. CE marking.OEM Model Description
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LAM RESEARCH CORPORATION
ONTRAK DSS-200
Verified
CATEGORY
Wafer Scrubber
Last Verified: 22 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
100945
Wafer Sizes:
4"/100mm, 6"/150mm, 8"/200mm
Vintage:
Unknown
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Logistics Support
Available
Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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View AllLAM RESEARCH CORPORATION
ONTRAK DSS-200
CATEGORY
Wafer Scrubber
Last Verified: 22 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
100945
Wafer Sizes:
4"/100mm, 6"/150mm, 8"/200mm
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
OnTrak DSS-200 CMP Double Sided Brush Cleaner. Double sided wafer cleaner for post CMP cleaning. The DSS-200 scrubs, rinses and dries 4”, 6” or 8” (100, 150 or 200mm) wafers. System is currently configured for 6" by 6" squares. Parts needed to change sizes. Consists of system electronics, a send indexer, a brush cleaning station, spin station and robotic edge handling receive indexer. Wafers are DI sprayed while in sender, moved to brush stations where they are cleaned by top and bottom brushes with DI and/or cleaning chemistry. In spinning station they are DI rinsed and dried. CE marking.Configuration
OnTrak DSS-200 CMP Double Sided Brush Cleaner. Double sided wafer cleaner for post CMP cleaning. The DSS-200 scrubs, rinses and dries 4”, 6” or 8” (100, 150 or 200mm) wafers. System is currently configured for 6" by 6" squares. Parts needed to change sizes. Consists of system electronics, a send indexer, a brush cleaning station, spin station and robotic edge handling receive indexer. Wafers are DI sprayed while in sender, moved to brush stations where they are cleaned by top and bottom brushes with DI and/or cleaning chemistry. In spinning station they are DI rinsed and dried. CE marking.OEM Model Description
None ProvidedDocuments
No documents