Description

Wafer Transport / OHT (Overhead Hoist Transport)

Configuration

No Configuration

OEM Model Description

The Murata SRC330 is an Overhead Hoist Transport (OHT) vehicle utilized in the semiconductor industry. It is engineered to carry 300mm wafer carriers that meet the SEMI E47.10 standard for 25 wafers. The vehicle moves along an overhead track and employs hoisting belts to reach semi-compliant load ports, enabling direct transportation of WIP carriers between tools, buffers, and other locations.

Documents

No documents

MURATA

SRC 330

Verified

Wafer Handling

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

135291

Wafer Sizes:

12"/300mm

Vintage:

Unknown

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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