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SRC 330
Category
Wafer HandlingOverview
The Murata SRC330 is an Overhead Hoist Transport (OHT) vehicle utilized in the semiconductor industry. It is engineered to carry 300mm wafer carriers that meet the SEMI E47.10 standard for 25 wafers. The vehicle moves along an overhead track and employs hoisting belts to reach semi-compliant load ports, enabling direct transportation of WIP carriers between tools, buffers, and other locations.
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