Description
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The Murata SRC330 is an Overhead Hoist Transport (OHT) vehicle utilized in the semiconductor industry. It is engineered to carry 300mm wafer carriers that meet the SEMI E47.10 standard for 25 wafers. The vehicle moves along an overhead track and employs hoisting belts to reach semi-compliant load ports, enabling direct transportation of WIP carriers between tools, buffers, and other locations.Documents
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MURATA
SRC 330
CATEGORY
Wafer Handling
Last Verified: Today
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
143388
Wafer Sizes:
Unknown
Vintage:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The Murata SRC330 is an Overhead Hoist Transport (OHT) vehicle utilized in the semiconductor industry. It is engineered to carry 300mm wafer carriers that meet the SEMI E47.10 standard for 25 wafers. The vehicle moves along an overhead track and employs hoisting belts to reach semi-compliant load ports, enabling direct transportation of WIP carriers between tools, buffers, and other locations.Documents
No documents