Description
2 FOUP 300mm EFEM Wafer SorterConfiguration
EFEM Wafer SorterOEM Model Description
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.Documents
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ASYST
SPARTAN
Verified
CATEGORY
Wafer Handling
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
59200
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASYST
SPARTAN
CATEGORY
Wafer Handling
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
59200
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
2 FOUP 300mm EFEM Wafer SorterConfiguration
EFEM Wafer SorterOEM Model Description
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.Documents
No documents