The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability. 

ASYST

SPARTAN

The ASYST VERSAPORT 2200 is a 200mm class load port system designed to present wafers on reticles to the process tool in a controlled environment, ensuring a cleanroom environment better than Class 1 standards for the substrate. It facilitates the smooth and contamination-free transfer of wafers, enhancing the overall efficiency and reliability of the semiconductor manufacturing process.

VERSAPORT 2200

ISOPORT

The ASYST LPT 2200 is a highly efficient robotics-load-port transfer system designed to transfer 6-inch or 8-inch wafer cassettes between a SMIF-PodTM and a Process Tool load position. It operates under the control of the Process Tool computer, Host computer, or a user. The LPT enables seamless wafer handling and ensures precision and reliability in the wafer transfer process. It complies with relevant SEMI-standards, ensuring compatibility and interoperability with other semiconductor equipment and systems.

LPT 2200

WMS DP 2200

The ASYST LPO 2200 is a wafer handler machine used for transferring wafers up to twelve-inch diameters with a load capacity up to 700 kilograms

LPO 2200

INDEXER 2200	

UTWF5501

21 ROBOT

LPX 2200 STD

INX-2200

S3 LOAD PORTS

12000-004

INDEXER

SMA 2000

The ASYST LPI 2200 is a device primarily used in semiconductor manufacturing processes. LPI stands for "Load Port Interface," indicating its role in facilitating the transfer of wafers between different stages of semiconductor fabrication.

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SPARTAN

VERSAPORT 2200

ISOPORT

LPT 2200

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