Description

NO MISSING PARTS Software - Version Summit 2.61 CIM - SECS Process - Film Thickness measurement tool

Configuration

Hardware Configuration ( FAB ) System Type Description Quantity Status Main System Main body 1 OK Others NA 0 OK Factory Interface SMIF 1 OK Handler System Robot & Pre-aligner 1 OK Options System NA 0 OK Hardware Configuration (Subfab/Auxilliary Units ) Description Quantity Status NA 0 Ok Missing/Faulty Parts / Accesorries List Description Quantity NA 0

OEM Model Description

The Prometrix UV-1280SE is a production thin film measurement system that combines dual-beam spectrophotometry and broadband spectroscopic ellipsometry. It can directly measure film thickness, refractive index, and extinction coefficient of single- and multi-layer thin film stacks simultaneously. The system is easy to use, lowers cost of ownership, and increases production efficiency. It is useful for both process control and advanced materials development.

Documents

KLA UV1280SE.pdf

KLA

UV-1280SE

Verified

Thin Film / Film Thickness

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

121275

Wafer Sizes:

Unknown

Vintage:

1999

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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