Description
TEL FURNACE INDY Model : INDY-I-L Process : LT ALD SiN Process : NH3, DCS, (SiGe), C2H4, HF, 20%F2 with N2, TiCl3 Liquid Wafer : 12inch Vintage : 2006. 07 Vintage : 2006. 07 Model : INDY-B-L Process : DCS-Nitride Process : D-POLY Process : N2O, NH3, SiH2Cl2, SiH4, PAC module Heater : VMM-56-002 Wafer : 12inch Vintage : 2010. 03 Vintage : 2007. 03 Vintage : 2006. 09 Vintage : 2007. 11 Model : ALPHA-303i-K Process : DCS-MTO Process : MTO Wafer : 12inch Vintage : 2009. 09 Vintage : 2002. 12 Vintage : 2001. 06Configuration
3x TEL Alpha 303i 6x Tel IndyOEM Model Description
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LOT
EQUIPMENT
CATEGORY
Support Equipment
Last Verified: Yesterday
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
148280
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
TEL FURNACE INDY Model : INDY-I-L Process : LT ALD SiN Process : NH3, DCS, (SiGe), C2H4, HF, 20%F2 with N2, TiCl3 Liquid Wafer : 12inch Vintage : 2006. 07 Vintage : 2006. 07 Model : INDY-B-L Process : DCS-Nitride Process : D-POLY Process : N2O, NH3, SiH2Cl2, SiH4, PAC module Heater : VMM-56-002 Wafer : 12inch Vintage : 2010. 03 Vintage : 2007. 03 Vintage : 2006. 09 Vintage : 2007. 11 Model : ALPHA-303i-K Process : DCS-MTO Process : MTO Wafer : 12inch Vintage : 2009. 09 Vintage : 2002. 12 Vintage : 2001. 06Configuration
3x TEL Alpha 303i 6x Tel IndyOEM Model Description
None ProvidedDocuments
No documents