Description

Software - MCSV 2.41, OCSV 2.41 CIM - SECS Photolithography Vax Station, Pin Chuck

Configuration

Interface - open cassette Handler - WL Type 3 Details Attached

OEM Model Description

"This i-line stepper from Nikon is one of our most popular lithography systems. Resolution ≦ 350 nm, exposure light source i-line (365 nm wavelength), reduction ratio 1:5, exposure field 22mm square to 17.9 (H) × 25.2 (V) mm (6-inch reticle), 20.0 × 20.4 mm (5-inch reticle), alignment accuracy (EGA, |M| + 3σ) ≦ 55 nm. The NIKON NSR 2205 i12D is a Steppers and Scanners system. The NSR 2205 i12D can be used with 8” wafer sizes.

Documents

lens_data_nikonnsr.pdf

NIKON

NSR-2205i12D

Verified

Steppers & Scanners

Last Verified: Today

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

146730

Wafer Sizes:

8"/200mm

Vintage:

1996

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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